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ASML Lunch Lecture
ASML Lunch Lecture
Semiconductor industry trends, Key innovations in Lithography Presenters: Martin Verhoeven, Peter Wardenier (ASML System Engineering, Veldhoven NL) Over the past 60 years, the semiconductor industry has relentlessly followed Moore’s law in creating ever smaller microchips. Lithography has played a pivotal role in shrinking the size of critical circuit features, albeit litho challenges have become very …